Kalrez O-Ring
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Kalrez O-Ring

Kalrez O-Rings are made from perfluoro elastomer (FFKM) material that provide reliable, long-term service with a wide range of aggressive industrial and electronic grade chemicals.

Purity is critical to high wafer yield. As a consequence, reducing contamination from particulates, outgassing and extractables caused by seal deterioration are all major goals for semiconductor fabricators. Manufacturers gain seal reliability and process purity when they rely on DuPont™ Kalrez® perfluoroelastomer parts.

Whether it’s etching, ashing/stripping, deposition, oxidation, diffusion furnace or “wet” processes, Kalrez® parts are field-proven in the manufacture of semiconductor chips. In a number of evaluations at fabline customers, Kalrez® parts exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers in both static and dynamic sealing applications.

Kalrez O-rings support standard and custom shapes that can resist over 1,800 different chemical while offering high temperature stability (direct exposure up to 325°)

Application: used in highly aggressive chemical processing, semiconductor, wafer processing, pharmaceutical, oil and gas recovery, aerospace, LCD, solar photo voltaic and petroleum application.

Kalrez is ideally suited because it offers :

  • Universal chemical and plasma resistance
  • Unrivalled thermal stability (up to 325°)
  • Long seal life and MTBF
  • Outstanding vacuum performance
  • Ultrapure semicon-specific polymers
  • Low particle contamination

Kromax also provides Kalrez bonded door seals with different Kalrez seal compounds available. Bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.