Our Products
Engineering plastic that has ultra low particle generation & low outgassing
Chemical Concentration Analyzer (GMT)
Global Measurement Technologies’ family of advanced process monitors offers process engineers the accuracy, reliability and flexibility for a higher degree of efficiency and consistency to meet the demands for higher yield and zero defect tolerance. In the ultra-competitive manufacturing environment, the most advanced facilities can ill afford highly expensive processes without the use of sophisticated monitoring and control to ensure consistent manufacturing.
Benefits of SemiChem
- Improved process reproducibility and uniformity
- Reduced consumable/chemical use
- Maximize tool CoO
Applications in the fab
- Pre diffusion clean - SOM/SPM , DHF , SC1-mega , SC2
- Pre gate (TWIN) clean - SOM/SPM , DHF , HCI
- Pre metal clean - SOM/SPM , SC1-mega , DHF
- Post metal clean - HF-EG
- Solvent Clean - NMP/EKC
- Post CPM clean - NH4OH , DHF
- Buffered oxide etch - BOE/DHF
- Nitride etch- DHF, hot Phos , SC1
- DSP+ - Dilute HF , H2O2 , H2SO4
- Resist removal - SOM/SPM
- CMP - Slurry / oxider
|
 |