Chemical Concentration Analyzer (GMT)

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Engineering plastic that has ultra low particle generation & low outgassing

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Global Measurement Technologies’ family of advanced process monitors offers process engineers the accuracy, reliability and flexibility for a higher degree of efficiency and consistency to meet the demands for higher yield and zero defect tolerance. In the ultra-competitive manufacturing environment, the most advanced facilities can ill afford highly expensive processes without the use of sophisticated monitoring and control to ensure consistent manufacturing.

Benefits of SemiChem

Improved process reproducibility and uniformity
Reduced consumable/chemical use
Maximize tool CoO

Applications in the fab

Pre diffusion clean - SOM/SPM , DHF , SC1-mega , SC2
Pre gate (TWIN) clean - SOM/SPM , DHF , HCI
Pre metal clean - SOM/SPM , SC1-mega , DHF
Post metal clean - HF-EG
Solvent Clean - NMP/EKC
Post CPM clean - NH₄OH , DHF
Buffered oxide etch - BOE/DHF
Nitride etch- DHF, hot Phos , SC1
DSP+ - Dilute HF , H₂O_{2 ,}H₂SO₄
Resist removal - SOM/SPM
CMP - Slurry / oxider