Chemical Concentration Analyzer (GMT)
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Chemical Concentration Analyzer (GMT)

Global Measurement Technologies’ family of advanced process monitors offers process engineers the accuracy, reliability and flexibility for a higher degree of efficiency and consistency to meet the demands for higher yield and zero defect tolerance. In the ultra-competitive manufacturing environment, the most advanced facilities can ill afford highly expensive processes without the use of sophisticated monitoring and control to ensure consistent manufacturing.

Benefits of SemiChem

  • Improved process reproducibility and uniformity
  • Reduced consumable/chemical use
  • Maximize tool CoO

Applications in the fab

  • Pre diffusion clean - SOM/SPM , DHF , SC1-mega , SC2
  • Pre gate (TWIN) clean - SOM/SPM , DHF , HCI
  • Pre metal clean - SOM/SPM , SC1-mega , DHF
  • Post metal clean - HF-EG
  • Solvent Clean - NMP/EKC
  • Post CPM clean - NH4OH , DHF
  • Buffered oxide etch - BOE/DHF
  • Nitride etch- DHF, hot Phos , SC1
  • DSP+ - Dilute HF , H2O2 , H2SO4
  • Resist removal - SOM/SPM
  • CMP - Slurry / oxider

 

SemiChem